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|Title:||A bi-stable silicon nanofin nanoelectromechanical switch based on van der Waals force for non-volatile memory applications|
|Citation:||Soon, B.W.,Singh, N.,Tsai, J.M.,Lee, C. (2013). A bi-stable silicon nanofin nanoelectromechanical switch based on van der Waals force for non-volatile memory applications. 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 : 562-565. ScholarBank@NUS Repository. https://doi.org/10.1109/NEMS.2013.6559793|
|Abstract:||We present a silicon nanofin (Si-NF) which can be actuated bi-directionally by electrostatic force between two contact surfaces. The switch is able to maintain its contact leveraging on van der Waals force that holds the Si-NF to either terminal without on-hold bias, thus showing a bi-stable hysteresis behavior. The measured pull-in voltage VPI and VRESET is 10V and -12V respectively, confirming that the switch can be reset by the opposite electrode. Since the switch toggles between two stable states, therefore it can be an ideal device for non-volatile memory (NVM) application. © 2013 IEEE.|
|Source Title:||8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013|
|Appears in Collections:||Staff Publications|
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