Please use this identifier to cite or link to this item: https://doi.org/10.1109/NEMS.2013.6559793
Title: A bi-stable silicon nanofin nanoelectromechanical switch based on van der Waals force for non-volatile memory applications
Authors: Soon, B.W.
Singh, N.
Tsai, J.M.
Lee, C. 
Keywords: Nanoelectromechanical systems
NEMS
non-volatile memory
NVM
relay
switch
Issue Date: 2013
Source: Soon, B.W.,Singh, N.,Tsai, J.M.,Lee, C. (2013). A bi-stable silicon nanofin nanoelectromechanical switch based on van der Waals force for non-volatile memory applications. 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 : 562-565. ScholarBank@NUS Repository. https://doi.org/10.1109/NEMS.2013.6559793
Abstract: We present a silicon nanofin (Si-NF) which can be actuated bi-directionally by electrostatic force between two contact surfaces. The switch is able to maintain its contact leveraging on van der Waals force that holds the Si-NF to either terminal without on-hold bias, thus showing a bi-stable hysteresis behavior. The measured pull-in voltage VPI and VRESET is 10V and -12V respectively, confirming that the switch can be reset by the opposite electrode. Since the switch toggles between two stable states, therefore it can be an ideal device for non-volatile memory (NVM) application. © 2013 IEEE.
Source Title: 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
URI: http://scholarbank.nus.edu.sg/handle/10635/83334
ISBN: 9781467363525
DOI: 10.1109/NEMS.2013.6559793
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