Please use this identifier to cite or link to this item: https://doi.org/10.1109/OMN.2013.6659113
Title: A 3-D movable THz filter using surface micromachining process
Authors: Lin, Y.-S.
Ma, F.
Lee, C. 
Keywords: filter
MEMS
metamaterial
Issue Date: 2013
Source: Lin, Y.-S.,Ma, F.,Lee, C. (2013). A 3-D movable THz filter using surface micromachining process. International Conference on Optical MEMS and Nanophotonics : 169-170. ScholarBank@NUS Repository. https://doi.org/10.1109/OMN.2013.6659113
Abstract: We have demonstrated a MEMS based tunable filter with reconfigurable electric split-ring resonators (eSRR) at THz frequencies. This is accomplished by making planar arrays of eSRR with stress curved beams (eSRR-SCBs) which are actuated out-of-plane by electrostatic force. Our results have demonstrated that the eSRR-SCBs possess blue shifting capabilities and polarization dependent state at THz frequencies, while such adaptive metamaterials offer significant potential in realizing novel electromagnetic functionality with diversified applications such as sensors, switches, and filters. © 2013 IEEE.
Source Title: International Conference on Optical MEMS and Nanophotonics
URI: http://scholarbank.nus.edu.sg/handle/10635/83323
ISBN: 9781479915125
ISSN: 21605033
DOI: 10.1109/OMN.2013.6659113
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