Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.proche.2009.07.325
Title: A 2-D MEMS Scanning Mirror Using Piezoelectric PZT Beam Actuators
Authors: Koh, K.H.
Kobayashi, T.
Hsiao, F.-L. 
Lee, C. 
Keywords: Microelectromechanical Systems (MEMS)
Optical MEMS
Piezoelectric actuator
PZT
Scanning mirror
Issue Date: Sep-2009
Citation: Koh, K.H., Kobayashi, T., Hsiao, F.-L., Lee, C. (2009-09). A 2-D MEMS Scanning Mirror Using Piezoelectric PZT Beam Actuators. Procedia Chemistry 1 (1) : 1303-1306. ScholarBank@NUS Repository. https://doi.org/10.1016/j.proche.2009.07.325
Abstract: A silicon micromirror driven by a piezoelectric Pb(Zr,Ti)O3 beam actuator has been demonstrated for two-dimensional scanning mirror applications. The mirror is micromachined from the device layer of an SOI wafer, while the piezoelectric beam actuator contains multilayers of Pt/Ti/PZT/Pt/Ti/SiO2/Si which is deposited and released from a SOI wafer. A 1x10 PZT arrayed actuator are separately arranged in parallel on a Si beam. Bending mode is measured at 34Hz as while the torsional mode is measured at 197Hz. We demonstrated 2-D raster scanning patterns by applying AC bias of 34Hz on half of the 10 actuators and 197Hz on the other half actuators. © 2009.
Source Title: Procedia Chemistry
URI: http://scholarbank.nus.edu.sg/handle/10635/83319
ISSN: 18766196
DOI: 10.1016/j.proche.2009.07.325
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