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https://doi.org/10.1116/1.1421565
DC Field | Value | |
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dc.title | X-ray photoemission spectroscopy study of silicidation of Ti on BF2 +-implanted polysilicon | |
dc.contributor.author | Chua, H.N. | |
dc.contributor.author | Pey, K.L. | |
dc.contributor.author | Lai, W.H. | |
dc.contributor.author | Chai, J.W. | |
dc.contributor.author | Pan, J.S. | |
dc.contributor.author | Chua, D.H.C. | |
dc.contributor.author | Siah, S.Y. | |
dc.date.accessioned | 2014-10-07T04:39:28Z | |
dc.date.available | 2014-10-07T04:39:28Z | |
dc.date.issued | 2001-11 | |
dc.identifier.citation | Chua, H.N., Pey, K.L., Lai, W.H., Chai, J.W., Pan, J.S., Chua, D.H.C., Siah, S.Y. (2001-11). X-ray photoemission spectroscopy study of silicidation of Ti on BF2 +-implanted polysilicon. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 19 (6) : 2252-2257. ScholarBank@NUS Repository. https://doi.org/10.1116/1.1421565 | |
dc.identifier.issn | 10711023 | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/83281 | |
dc.description.abstract | Fluorine reactions between Ti and Si at the interface during Ti silicidation at temperatures ranging from 500 to 700 °C were studied. The types of fluorosilyl moieties formed during this interaction were identified. The binding energy shifts observed in the F 1s XPS spectra during silicidation may result from Ti-F, Si-F, and Si-F-O bond formation. A further increase in the annealing temperature beyond 550°C led to significant out-diffusion of fluorine containing species from the reaction layer. | |
dc.description.uri | http://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1116/1.1421565 | |
dc.source | Scopus | |
dc.type | Article | |
dc.contributor.department | ELECTRICAL & COMPUTER ENGINEERING | |
dc.description.doi | 10.1116/1.1421565 | |
dc.description.sourcetitle | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures | |
dc.description.volume | 19 | |
dc.description.issue | 6 | |
dc.description.page | 2252-2257 | |
dc.description.coden | JVTBD | |
dc.identifier.isiut | 000173159900041 | |
Appears in Collections: | Staff Publications |
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