Please use this identifier to cite or link to this item: https://doi.org/10.1016/S0304-8853(02)00292-5
Title: Radio frequency substrate bias effect on properties of Co thin film and multilayer structures
Authors: Ng, V. 
Hu, J.F.
Adeyeye, A.O. 
Wang, J.P. 
Chong, T.C. 
Keywords: Magnetic thin films
Multilayers
Substrate bias
Surface roughness
Issue Date: Jun-2002
Citation: Ng, V., Hu, J.F., Adeyeye, A.O., Wang, J.P., Chong, T.C. (2002-06). Radio frequency substrate bias effect on properties of Co thin film and multilayer structures. Journal of Magnetism and Magnetic Materials 247 (3) : 339-344. ScholarBank@NUS Repository. https://doi.org/10.1016/S0304-8853(02)00292-5
Abstract: This paper reports the surface roughness effect on magnetic properties of Co thin films and the switching properties of the multilayer structures. Surface roughness is varied by using Ni80Fe20 thin film as an underlayer. The surface roughness of Ni80Fe20 thin films was controlled by applying different radio frequency (RF) biases to the substrate during the sputtering of Ni80Fe20 underlayer. Surface roughness effect on the magnetic properties of Co thin films and the switching properties of the multilayer structures were studied with Si/Ni80Fe20/Al/Co/Al and Si/Ni80Fe20/Al/Co/Al2O3/Ni80 Fe20/Al multilayer films. Results indicate that the RF-substrate-bias-induced surface roughness has a great influence on the magnetic properties of Co films and the switching properties of the multilayer structures. © 2002 Elsevier Science B.V. All rights reserved.
Source Title: Journal of Magnetism and Magnetic Materials
URI: http://scholarbank.nus.edu.sg/handle/10635/82955
ISSN: 03048853
DOI: 10.1016/S0304-8853(02)00292-5
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