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|Title:||Quasi-two-dimensional transmission line model (QTD-TLM) for planar ohmic contact studies|
|Authors:||Chor, E.F. |
Specific contact resistance
|Citation:||Chor, E.F., Lerdworatawee, J. (2002-01). Quasi-two-dimensional transmission line model (QTD-TLM) for planar ohmic contact studies. IEEE Transactions on Electron Devices 49 (1) : 105-111. ScholarBank@NUS Repository. https://doi.org/10.1109/16.974756|
|Abstract:||An analytical quasi-two-dimensional transmission line model (QTD-TLM) has been formulated to more accurately extract the specific contact resistance (ρ c) of ohmic contacts than the conventional one-dimensional TLM (1D-TLM). Similar to 1D-TLM, the extraction of ρ c using QTD-TLD is straightforward. By means of the conformal mapping technique, the two-dimensional (2-D) (or lateral) current flow and current crowding, owing to the presence of a gap between the TLM mesa and contacts, are jointly incorporated into our model using a single shunt resistor. QTD-TLM is generalized as it is applicable to a variety of contact dimensions and gap widths, and to both alloyed and nonalloyed contacts. The validity of QTD-TLM has been verified experimentally using two alloyed and two nonalloyed ohmic contacts, and by comparison with results from a 2-D numerical model.|
|Source Title:||IEEE Transactions on Electron Devices|
|Appears in Collections:||Staff Publications|
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