Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.jallcom.2006.02.111
Title: Patterning of phase change films with microlens arrays
Authors: Lin, Y. 
Hong, M.H. 
Chen, G.X. 
Lim, C.S. 
Wang, Z.B.
Tan, L.S. 
Shi, L.P.
Chong, T.C. 
Keywords: Atomic force microscopy
Microlens array
Near-field scanning optical microscopy
Phase change
Issue Date: 31-Jan-2008
Source: Lin, Y., Hong, M.H., Chen, G.X., Lim, C.S., Wang, Z.B., Tan, L.S., Shi, L.P., Chong, T.C. (2008-01-31). Patterning of phase change films with microlens arrays. Journal of Alloys and Compounds 449 (1-2) : 253-257. ScholarBank@NUS Repository. https://doi.org/10.1016/j.jallcom.2006.02.111
Abstract: Nanometer-sized features were fabricated on Ge1Sb2Te4 phase change films uniformly by irradiation with the fundamental and second harmonic components of a Nd:YAG laser through a microlens array. The effect of laser fluence and laser wavelength on the feature size was investigated. The change in the morphology and optical property of the phase change film was characterized. The smallest feature size of 355 nm was produced by using a low laser fluence and the 532 nm second harmonic of the laser. This was much smaller than the focus beam size of the microlens. The laser irradiation caused the formation of crystalline features on the amorphous phase change film. The amorphous region of the film could be removed by dipping in a NaOH solution, leaving the crystalline regions unaffected. © 2006 Elsevier B.V. All rights reserved.
Source Title: Journal of Alloys and Compounds
URI: http://scholarbank.nus.edu.sg/handle/10635/82867
ISSN: 09258388
DOI: 10.1016/j.jallcom.2006.02.111
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