Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.diamond.2006.07.020
Title: Novel hybrid facing targets sputtered amorphous carbon overcoat for ultra-high density hard disk media
Authors: Poh, W.C.
Piramanayagam, S.N.
Shi, J.R.
Liew, T. 
Keywords: Amorphous carbon
Coatings
Corrosion
Sputtering
Issue Date: Feb-2007
Source: Poh, W.C., Piramanayagam, S.N., Shi, J.R., Liew, T. (2007-02). Novel hybrid facing targets sputtered amorphous carbon overcoat for ultra-high density hard disk media. Diamond and Related Materials 16 (2) : 379-387. ScholarBank@NUS Repository. https://doi.org/10.1016/j.diamond.2006.07.020
Abstract: Amorphous carbon films form a critical protective layer on magnetic hard disk media. A novel in-house configured hybrid facing targets sputtering (HyFTS) utilizing a special magnetron arrangement was used to deposit amorphous carbon (a-C) overcoats. The corrosion inhibition ability and mechanical property were investigated and compared with that of the a-C overcoats deposited by conventional magnetron sputtering (CMS). Studies were done using electrochemical techniques and nano-scratch analysis to determine how corrosion inhibition ability changes at thickness of 2 nm and 5 nm and the scratch resistance of the two types of a-C overcoats, respectively. Electrochemical impedance spectroscopy and potentiodynamic polarization investigations have shown that a-C films deposited by HyFTS have good corrosion resistance even at 2 nm thickness. But at 2 nm, CMS deposited a-C overcoat shows sign of corrosion. Nano-scratch test has also shown improved scratch resistance of the HyFTS deposited a-C. This may be attributed to the better quality film with higher sp3 content deposited by HyFTS as a result of it having a higher amount of ionized species generated. © 2006 Elsevier B.V. All rights reserved.
Source Title: Diamond and Related Materials
URI: http://scholarbank.nus.edu.sg/handle/10635/82785
ISSN: 09259635
DOI: 10.1016/j.diamond.2006.07.020
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