Please use this identifier to cite or link to this item:
https://scholarbank.nus.edu.sg/handle/10635/82761
DC Field | Value | |
---|---|---|
dc.title | Nickel silicide formation on Si(100) and poly-Si with a presilicide N2 + implantation | |
dc.contributor.author | Lee, P.S. | |
dc.contributor.author | Mangelinck, D. | |
dc.contributor.author | Pey, K.L. | |
dc.contributor.author | Ding, J. | |
dc.contributor.author | Chi, D.Z. | |
dc.contributor.author | Dai, J.Y. | |
dc.contributor.author | See, A. | |
dc.date.accessioned | 2014-10-07T04:33:11Z | |
dc.date.available | 2014-10-07T04:33:11Z | |
dc.date.issued | 2001-12 | |
dc.identifier.citation | Lee, P.S.,Mangelinck, D.,Pey, K.L.,Ding, J.,Chi, D.Z.,Dai, J.Y.,See, A. (2001-12). Nickel silicide formation on Si(100) and poly-Si with a presilicide N2 + implantation. Journal of Electronic Materials 30 (12) : 1554-1559. ScholarBank@NUS Repository. | |
dc.identifier.issn | 03615235 | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/82761 | |
dc.description.abstract | The key feature of this study is to incorporate N2 + implant prior to Ni sputtering on the poly-Si gate and source/drain regions. The results show that the incorporation of the presilicide N2 + implant is able to suppress agglomeration in the Ni silicide films up to 900°C and enhance the phase stability of NiSi on Si(100) up to 750°C. Stable and low sheet resistance was achieved on the silicided undoped poly-Si up to 700°C due to reduced layer inversion, which is driven by grain boundary energy and the surface energy of the poly-Si. | |
dc.source | Scopus | |
dc.subject | Agglomeration | |
dc.subject | Layer inversion | |
dc.subject | N2 + Implant | |
dc.subject | NiSi | |
dc.subject | Phase stability | |
dc.type | Article | |
dc.contributor.department | ELECTRICAL & COMPUTER ENGINEERING | |
dc.contributor.department | MATERIALS SCIENCE | |
dc.contributor.department | PHYSICS | |
dc.description.sourcetitle | Journal of Electronic Materials | |
dc.description.volume | 30 | |
dc.description.issue | 12 | |
dc.description.page | 1554-1559 | |
dc.description.coden | JECMA | |
dc.identifier.isiut | NOT_IN_WOS | |
Appears in Collections: | Staff Publications |
Show simple item record
Files in This Item:
There are no files associated with this item.
Google ScholarTM
Check
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.