Please use this identifier to cite or link to this item:
https://doi.org/10.1063/1.4776191
DC Field | Value | |
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dc.title | Method for real-time critical dimensions signature monitoring and control: Sensor, actuator, and experimental results | |
dc.contributor.author | Ngo, Y.S. | |
dc.contributor.author | Ang, K.T. | |
dc.contributor.author | Tay, A. | |
dc.date.accessioned | 2014-10-07T04:32:22Z | |
dc.date.available | 2014-10-07T04:32:22Z | |
dc.date.issued | 2013-01 | |
dc.identifier.citation | Ngo, Y.S., Ang, K.T., Tay, A. (2013-01). Method for real-time critical dimensions signature monitoring and control: Sensor, actuator, and experimental results. Review of Scientific Instruments 84 (1) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.4776191 | |
dc.identifier.issn | 00346748 | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/82690 | |
dc.description.abstract | We present in this paper a system and method for real-time monitoring and control of critical dimensions (CD) signature profile in lithography. The proposed system involves the development and integration of a scatterometry system, a programmable multi-zone thermal processing system, and control system software. Based on scatterometry, the intensity and phase of the reflected light from the resist film are measured at a fixed incident angle and across multiple wavelengths. A programmable thermal processing system is then used to adjust the processing temperature during post-exposure baking in lithography to achieve the desired CD signature profile. Experimental results demonstrate the feasibility of the proposed approach. An improvement of CD signature control of 85% is achieved in terms of the mean square error with and without control. © 2013 American Institute of Physics. | |
dc.description.uri | http://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1063/1.4776191 | |
dc.source | Scopus | |
dc.type | Article | |
dc.contributor.department | ELECTRICAL & COMPUTER ENGINEERING | |
dc.description.doi | 10.1063/1.4776191 | |
dc.description.sourcetitle | Review of Scientific Instruments | |
dc.description.volume | 84 | |
dc.description.issue | 1 | |
dc.description.page | - | |
dc.description.coden | RSINA | |
dc.identifier.isiut | 000314729100075 | |
Appears in Collections: | Staff Publications |
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