Please use this identifier to cite or link to this item: https://doi.org/10.1109/LED.2009.2034545
Title: High-performance MIM capacitors using HfLaO-based dielectrics
Authors: Zhang, L.
He, W. 
Chan, D.S.H. 
Cho, B.J.
Keywords: Hafnium oxide
High-ê dielectric
Lanthanum oxide
Metal'insulator'metal (MIM)
Multilayer dielectric structure
Issue Date: Jan-2010
Citation: Zhang, L., He, W., Chan, D.S.H., Cho, B.J. (2010-01). High-performance MIM capacitors using HfLaO-based dielectrics. IEEE Electron Device Letters 31 (1) : 17-19. ScholarBank@NUS Repository. https://doi.org/10.1109/LED.2009.2034545
Abstract: Metalinsulatormetal (MIM) capacitors fabricated with (8%) La-doped HfO 2 single layer as well as HfLaO/LaAlO3HfLaO multilayer dielectric stack are demonstrated. While the La-doped HfO2 single layer is crystallized at 420 C° annealing, HfLaO/LaAlO3/HfLaO multilayer dielectric stack remains amorphous. A high dielectric-constant value of 38 can be obtained when 8% La-doped HfO2 is crystallized into cubiclike structure. However, it is observed that the linearity of MIM capacitor is degraded upon crystallization. The multilayer film has lower average dielectric constant but shows low quadratic voltage linearity of less than 1000 ppm/V2 up to a capacitance density of 9 fF/μm2. It is observed that the HfLaO single-layer MIM is suitable for the applications with requirements of high capacitance density and robust reliability, while the multilayer MIM is suitable for a precision circuit. © 2006 IEEE.
Source Title: IEEE Electron Device Letters
URI: http://scholarbank.nus.edu.sg/handle/10635/82466
ISSN: 07413106
DOI: 10.1109/LED.2009.2034545
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

13
checked on Jul 21, 2018

WEB OF SCIENCETM
Citations

11
checked on Jun 6, 2018

Page view(s)

24
checked on Jul 20, 2018

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.