Please use this identifier to cite or link to this item: https://doi.org/10.1088/0957-4484/15/11/029
Title: Fabrication of large area nanomagnets
Authors: Singh, N.
Goolaup, S. 
Adeyeye, A.O. 
Issue Date: Nov-2004
Citation: Singh, N., Goolaup, S., Adeyeye, A.O. (2004-11). Fabrication of large area nanomagnets. Nanotechnology 15 (11) : 1539-1544. ScholarBank@NUS Repository. https://doi.org/10.1088/0957-4484/15/11/029
Abstract: We have developed a large area technique for fabricating magnetic nanostructures. This technique is based on deep ultraviolet lithography followed by a lift-off process. A phase shift mask is used to create nanoscale patterns of very high density. By varying the focus and exposure doses we have synthesized multiple patterns using the same mask. Arrays of Ni 80Fe 20 nanostructures of different shapes and sizes were fabricated using this technique. Scanning electron microscopy was used to verify the lateral dimensions and uniformity of the structures. We have used a vibrating sample magnetometer to characterize the magnetic properties of the fabricated structures. We observed a marked increase in both the coercivity and the switching field of the patterned nanomagnets compared with the reference film due to the magnetic shape anisotropy.
Source Title: Nanotechnology
URI: http://scholarbank.nus.edu.sg/handle/10635/82336
ISSN: 09574484
DOI: 10.1088/0957-4484/15/11/029
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