Please use this identifier to cite or link to this item: https://doi.org/10.1063/1.4867044
Title: Evidence on simultaneous improvement of motional impedance and Q-factor of silicon phononic crystal micromechanical resonators by variously engineering the cavity defects
Authors: Wang, N.
Hsiao, F.-L.
Palaniapan, M. 
Lee, C. 
Issue Date: 2014
Citation: Wang, N., Hsiao, F.-L., Palaniapan, M., Lee, C. (2014). Evidence on simultaneous improvement of motional impedance and Q-factor of silicon phononic crystal micromechanical resonators by variously engineering the cavity defects. Journal of Applied Physics 115 (9) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.4867044
Abstract: In this work, we report the experimental evidence on the capability to simultaneously improve the Q-factor (Q) and motional impedance (Z) of silicon phononic crystal (PnC) micromechanical (MM) resonators by properly engineering the cavity defects on an otherwise perfect two-dimensional (2D) silicon PnC slab. The cavity defects of the resonators in the current study are engineered by patterning additional scattering holes to the pure Fabry-Perot resonant cavity, which is created by deleting two rows of scattering air holes from the centre of the 2D square air-hole array. Experimental results show that by varying the radii of the additional scattering holes patterned in the cavity, the fabricated silicon PnC MM resonators can have their Q and Z improved simultaneously, showing great potential in overcoming the trade-off between Z and Q in conventional resonators of piezoelectric type and capacitive type. © 2014 AIP Publishing LLC.
Source Title: Journal of Applied Physics
URI: http://scholarbank.nus.edu.sg/handle/10635/82308
ISSN: 00218979
DOI: 10.1063/1.4867044
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