Please use this identifier to cite or link to this item:
https://doi.org/10.1109/LED.2006.875722
DC Field | Value | |
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dc.title | Advanced HfTaON/SiO2 gate stack with high mobility and low leakage current for low-standby-power application | |
dc.contributor.author | Yu, X. | |
dc.contributor.author | Yu, M. | |
dc.contributor.author | Zhu, C. | |
dc.date.accessioned | 2014-10-07T04:23:29Z | |
dc.date.available | 2014-10-07T04:23:29Z | |
dc.date.issued | 2006-06 | |
dc.identifier.citation | Yu, X., Yu, M., Zhu, C. (2006-06). Advanced HfTaON/SiO2 gate stack with high mobility and low leakage current for low-standby-power application. IEEE Electron Device Letters 27 (6) : 498-501. ScholarBank@NUS Repository. https://doi.org/10.1109/LED.2006.875722 | |
dc.identifier.issn | 07413106 | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/81940 | |
dc.description.abstract | A novel HfTaON/SiO2 gate stack has been investigated for low-standby-power (LSTP) CMOS application. This gate stack exhibited good physical and electrical characteristics, including good thermal stability up to 1000 °C low gate-leakage current, excellent interface properties, and superior electron and hole mobility (100% and 96% of universal curves at 0.8 MV/cm). The excellent characteristics observed in HfTaON/SiO2 suggest that it may be a very promising gate stack for advanced LSTP CMOS application. © 2006 IEEE. | |
dc.description.uri | http://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1109/LED.2006.875722 | |
dc.source | Scopus | |
dc.subject | High-κ gate dielectric | |
dc.subject | Interface-state density (Dit) | |
dc.subject | Metal gate | |
dc.subject | Mobility | |
dc.subject | MOSFETs | |
dc.subject | Tthermal stability | |
dc.type | Article | |
dc.contributor.department | ELECTRICAL & COMPUTER ENGINEERING | |
dc.description.doi | 10.1109/LED.2006.875722 | |
dc.description.sourcetitle | IEEE Electron Device Letters | |
dc.description.volume | 27 | |
dc.description.issue | 6 | |
dc.description.page | 498-501 | |
dc.description.coden | EDLED | |
dc.identifier.isiut | 000238070500024 | |
Appears in Collections: | Staff Publications |
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