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Please use this identifier to cite or link to this item: https://scholarbank.nus.edu.sg/handle/10635/81776
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dc.titleTheoretical and experimental investigation on laser dry cleaning of particles from substrate surfaces
dc.contributor.authorSong, W.D.
dc.contributor.authorLu, Y.F.
dc.contributor.authorHong, M.H.
dc.contributor.authorChong, T.C.
dc.contributor.authorLow, T.S.
dc.date.accessioned2014-10-07T03:11:55Z
dc.date.available2014-10-07T03:11:55Z
dc.date.issued1996
dc.identifier.citationSong, W.D.,Lu, Y.F.,Hong, M.H.,Chong, T.C.,Low, T.S. (1996). Theoretical and experimental investigation on laser dry cleaning of particles from substrate surfaces. LEOS Summer Topical Meeting : 2pp-. ScholarBank@NUS Repository.
dc.identifier.issn10994742
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/81776
dc.description.abstractIn order to develop laser cleaning technology to meet the need of industry, it is very important to investigate the cleaning efficiency and mechanism of this cleaning technology. This paper discusses the theoretical and experimental investigation on laser dry cleaning of particles from substrate surfaces.
dc.sourceScopus
dc.typeConference Paper
dc.contributor.departmentDATA STORAGE INSTITUTE
dc.contributor.departmentELECTRICAL ENGINEERING
dc.description.sourcetitleLEOS Summer Topical Meeting
dc.description.page2pp-
dc.description.coden163
dc.identifier.isiutNOT_IN_WOS
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