Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/81776
Title: Theoretical and experimental investigation on laser dry cleaning of particles from substrate surfaces
Authors: Song, W.D. 
Lu, Y.F. 
Hong, M.H. 
Chong, T.C. 
Low, T.S. 
Issue Date: 1996
Source: Song, W.D.,Lu, Y.F.,Hong, M.H.,Chong, T.C.,Low, T.S. (1996). Theoretical and experimental investigation on laser dry cleaning of particles from substrate surfaces. LEOS Summer Topical Meeting : 2pp-. ScholarBank@NUS Repository.
Abstract: In order to develop laser cleaning technology to meet the need of industry, it is very important to investigate the cleaning efficiency and mechanism of this cleaning technology. This paper discusses the theoretical and experimental investigation on laser dry cleaning of particles from substrate surfaces.
Source Title: LEOS Summer Topical Meeting
URI: http://scholarbank.nus.edu.sg/handle/10635/81776
ISSN: 10994742
Appears in Collections:Staff Publications

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