Series resistance and effective channel mobility degradation in LDD NMOSFETs under hot-carrier stressing

Abstract

With the ability to independently extract the series drain resistance and effective channel mobility from a single MOSFET device, the individual effect of these two parameters on the hot-carrier degradation in graded-drain nMOSFETs was separated and investigated. A self-limiting behaviour due to trapped charge and interface state generation was observed. A three-stage degradation model was proposed to explain the observed hot-carrier degradation behaviour.