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|Title:||Mathematical modelling on the quadrature error of low-rate microgyroscope for aerospace applications|
|Authors:||Yeh, Bao Y.|
Liang, Yung C.
Tay, Francis E.H.
|Citation:||Yeh, Bao Y.,Liang, Yung C.,Tay, Francis E.H. (2000). Mathematical modelling on the quadrature error of low-rate microgyroscope for aerospace applications. Proceedings of SPIE - The International Society for Optical Engineering 4019 : 134-144. ScholarBank@NUS Repository.|
|Abstract:||This paper reports on the mathematical modelling on the quadrature error of a micro gyroscope due to the imbalance of the flexures. Quadrature error occurs when the proof mass of a micro gyroscope oscillates along an axis that is not exactly parallel to the X-axis. The asymmetric spring flexures due to manufacturing variation can cause the proof mass to rotate when a force acts on the proof mass. The mathematical model is verified using finite element software, Intellicad and found to have a good agreement with the simulation results for angles of rotation of comb fingers below 5.26°. The mathematical model provides a new avenue of approach in solving the quadrature error problem and in saving the overall simulation time. The spring constant of the fishhook flexure can be calculated from Castigliano's energy theorem and substituted into the mathematical model to find out the size of the quadrature error. The sensitivity of a fishhook flexure to its dimensions is analyzed.|
|Source Title:||Proceedings of SPIE - The International Society for Optical Engineering|
|Appears in Collections:||Staff Publications|
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