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|Title:||Golden-template self-generating method for patterned wafer inspection|
|Citation:||Xie, P., Guan, S.-U. (2000-10). Golden-template self-generating method for patterned wafer inspection. Machine Vision and Applications 12 (3) : 149-156. ScholarBank@NUS Repository.|
|Abstract:||This paper presents a novel golden-template selfgenerating technique for detecting possible defects in periodic two-dimensional wafer images. A golden template of the patterned wafer image under inspection can be obtained from the wafer image itself and no other prior knowledge is needed. It is a bridge between the existing self-reference methods and image-to-image reference methods. Spectral estimation is used in the first step to derive the periods of repeating patterns in both directions. Then a building block representing the structure of the patterns is extracted using interpolation to obtain sub-pixel resolution. After that, a new defect-free golden template is built based on the extracted building block. Finally, a pixel-to-pixel comparison is all we need to find possible defects. A comparison between the results of the proposed method and those of the previously published methods is presented.|
|Source Title:||Machine Vision and Applications|
|Appears in Collections:||Staff Publications|
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