Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/80408
Title: Experimental and numerical investigation of the surface reliefs formed on a moving silicon substrate by pulses of a Gaussian laser
Authors: Wee, T.-S.
Lu, Y.-F. 
Chim, W.-K. 
Keywords: Laser induced temperature profile
Laser-induced melt relief
Numerical laser melting model
Pulsed laser melting
Silicon
Issue Date: Jul-1998
Citation: Wee, T.-S.,Lu, Y.-F.,Chim, W.-K. (1998-07). Experimental and numerical investigation of the surface reliefs formed on a moving silicon substrate by pulses of a Gaussian laser. Materials Chemistry and Physics 54 (1-3) : 205-209. ScholarBank@NUS Repository.
Abstract: When pulses of a Gaussian laser beam with sufficient energy intensity are applied on to the surface of a moving substrate, interesting surface reliefs can be formed at the spots where the beam strikes the substrate. In this paper, experimental findings of such laser-induced melt reliefs formed on the surface of a silicon substrate using laser pulses from a CW Ar+ laser are reported. The dependence of the size of the reliefs on parameters such as the power of the laser beam and the speed at which the substrate moves under the laser irradiation are investigated. A numerical finite element routine has also been developed to model the laser melting problem. With the help of the melting model, attempts to deduce the formation of these melt reliefs have been carried out. © 1998 Elsevier Science S.A. All rights reserved.
Source Title: Materials Chemistry and Physics
URI: http://scholarbank.nus.edu.sg/handle/10635/80408
ISSN: 02540584
Appears in Collections:Staff Publications

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