Please use this identifier to cite or link to this item: https://doi.org/10.1016/S0921-5107(99)00486-9
Title: Effects of RF power and annealing on the electrical and structural properties of sputtered amorphous silicon carbide films
Authors: Choi, W.K. 
Chong, N.B.
Tan, L.S. 
Han, L.J.
Issue Date: 15-Mar-2000
Citation: Choi, W.K., Chong, N.B., Tan, L.S., Han, L.J. (2000-03-15). Effects of RF power and annealing on the electrical and structural properties of sputtered amorphous silicon carbide films. Materials Science and Engineering B: Solid-State Materials for Advanced Technology 72 (2) : 132-134. ScholarBank@NUS Repository. https://doi.org/10.1016/S0921-5107(99)00486-9
Abstract: The influence of rf sputtering power and annealing temperature on the dc conductivity (σRT), activation energy (ΔE) and interface trapped charge density (Dit) of rf sputtered hydrogenated amorphous silicon carbide films were investigated. The increase in σRT and the decrease in ΔE as rf power increased indicate an increase in dangling bond density. Furnace annealing, however, causes a reduction in σRT and Dit. The electrical results of the as-prepared and annealed films agreed well with the infrared results.
Source Title: Materials Science and Engineering B: Solid-State Materials for Advanced Technology
URI: http://scholarbank.nus.edu.sg/handle/10635/80379
ISSN: 09215107
DOI: 10.1016/S0921-5107(99)00486-9
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