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Title: | Detection of defect states responsible for leakage current in ultrathin tantalum pentoxide (Ta2O5) films by zero-bias thermally stimulated current spectroscopy | Authors: | Lau, W.S. Zhong, L. Lee, A. See, C.H. Han, T. Sandier, N.P. Chong, T.C. |
Issue Date: | 28-Jul-1997 | Citation: | Lau, W.S.,Zhong, L.,Lee, A.,See, C.H.,Han, T.,Sandier, N.P.,Chong, T.C. (1997-07-28). Detection of defect states responsible for leakage current in ultrathin tantalum pentoxide (Ta2O5) films by zero-bias thermally stimulated current spectroscopy. Applied Physics Letters 71 (4) : 500-502. ScholarBank@NUS Repository. | Abstract: | Defect states responsible for leakage current in ultrathin (physical thickness | Source Title: | Applied Physics Letters | URI: | http://scholarbank.nus.edu.sg/handle/10635/80355 | ISSN: | 00036951 |
Appears in Collections: | Staff Publications |
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