Please use this identifier to cite or link to this item: https://doi.org/10.1063/1.1563045
Title: Nitrogen-enhanced negative bias temperature instability: An insight by experiment and first-principle calculations
Authors: Tan, S.S.
Chen, T.P.
Soon, J.M.
Loh, K.P. 
Ang, C.H.
Chan, L.
Issue Date: 24-Mar-2003
Citation: Tan, S.S., Chen, T.P., Soon, J.M., Loh, K.P., Ang, C.H., Chan, L. (2003-03-24). Nitrogen-enhanced negative bias temperature instability: An insight by experiment and first-principle calculations. Applied Physics Letters 82 (12) : 1881-1883. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1563045
Abstract: The nitrogen-enhanced negative bias temperature instability (NBTI) effect was studied experimentally and theoretically. It was observed that both the interface state and positive fixed charge generation increased linearly with interfacial nitrogen concentration. The results were analyzed in terms of the reaction energies of the hydrogen trapping reactions at the interface, obtained from first principles calculations.
Source Title: Applied Physics Letters
URI: http://scholarbank.nus.edu.sg/handle/10635/76640
ISSN: 00036951
DOI: 10.1063/1.1563045
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