Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.nimb.2007.02.062
Title: Fabrication of nanofluidic devices utilizing proton beam writing and thermal bonding techniques
Authors: Wang, L.P.
Shao, P.G. 
van Kan, J.A. 
Ansari, K. 
Bettiol, A.A. 
Pan, X.T.
Wohland, T. 
Watt, F. 
Keywords: Lab-on-a-chip
Nanofabrication
Nanofluidics
Proton beam writing
Thermal bonding
Issue Date: Jul-2007
Citation: Wang, L.P., Shao, P.G., van Kan, J.A., Ansari, K., Bettiol, A.A., Pan, X.T., Wohland, T., Watt, F. (2007-07). Fabrication of nanofluidic devices utilizing proton beam writing and thermal bonding techniques. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 260 (1) : 450-454. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2007.02.062
Abstract: The fabrication of polymer lab-on-a-chip systems for applications in Chemistry and Biology is one of the envisaged niche areas for the Proton Beam Writing (PBW) technique developed at the Centre for Ion Beam Applications (CIBA). Utilizing a highly focused beam of MeV protons, well-defined nanostructures with smooth and straight side walls have been directly written in a 500 nm to 10 μm thick PMMA layer spin coated onto a Kapton substrate. By subsequently thermally bonding the fabricated structures to bulk PMMA and carefully peeling off the Kapton, nanostructures can be attached to bulk PMMA. Finally, by bonding a PMMA sheet to the bottom side of the structure, an integrated PMMA device with enclosed multiple high aspect ratio nanochannels can be realized. Preliminary experiments conducted in order to test this polymeric device indicate good fluidic properties. The nanochannels can be easily filled with dye solution using both pressure and capillary action in the case of hydrophilic solutions. © 2007 Elsevier B.V. All rights reserved.
Source Title: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
URI: http://scholarbank.nus.edu.sg/handle/10635/76161
ISSN: 0168583X
DOI: 10.1016/j.nimb.2007.02.062
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