Please use this identifier to cite or link to this item: https://doi.org/10.1166/jnn.2012.5416
Title: Structural studies of aluminium nitride embedded in amorphous carbon
Authors: T. Koh, A.T.
Foong, Y.M.
Phang, B.Z.
Chua, D.H.C. 
Tanemura, M.
Keywords: AlN
Diamond-Like Carbon
Nanocomposite
Surface Characterization
Issue Date: Aug-2012
Citation: T. Koh, A.T., Foong, Y.M., Phang, B.Z., Chua, D.H.C., Tanemura, M. (2012-08). Structural studies of aluminium nitride embedded in amorphous carbon. Journal of Nanoscience and Nanotechnology 12 (8) : 6526-6530. ScholarBank@NUS Repository. https://doi.org/10.1166/jnn.2012.5416
Abstract: Aluminum nitride containing diamond-like carbon was fabricated with pulsed laser deposition without post processing. The compositions of the targets used were varied at 1, 5, 10, 15 at.% and pure carbon was used as a reference. The films were comprehensively characterized with Atomic force microscope (AFM), X-ray photoelectron spectroscopy (XPS) and Transmission electron microscopy (TEM). Roughness analysis using AFM showed an increasing root-mean-square (RMS) roughness with increasing AlN content in target, while XPS analysis showed that the aluminum-nitrogen bonding was still present in the films after the fabrication process. Microstructural studies and selected area electron diffraction (SAED) pattern confirmed the presence of AlN crystals in DLC matrix. This nanostructured composite material is useful for luminescence applications. Copyright © 2012 American Scientific Publishers.
Source Title: Journal of Nanoscience and Nanotechnology
URI: http://scholarbank.nus.edu.sg/handle/10635/75249
ISSN: 15334880
DOI: 10.1166/jnn.2012.5416
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