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Title: Modeling of the optical torsion micromirror
Authors: Zhang, X.M.
Chau, F.S. 
Quan, C. 
Liu, A.Q.
Issue Date: 1999
Source: Zhang, X.M.,Chau, F.S.,Quan, C.,Liu, A.Q. (1999). Modeling of the optical torsion micromirror. Proceedings of SPIE - The International Society for Optical Engineering 3899 : 109-116. ScholarBank@NUS Repository.
Abstract: Torsion micromirror devices have been widely used in many applications. This paper describes the modeling of a torsion beam micromirror based on the parallel plate capacitor model. First, a generalized and normalized equation that governs the static characteristics of the torsion micromirror device is derived. Henceforth the influence of the structural parameters of micromirror is discussed, and the snap-down effect and the capacitance variation of the micromirror are studied. Finally, a micromirror is designed and fabricated. However, the model has not yet been verified by experiment data as testing is in progress.
Source Title: Proceedings of SPIE - The International Society for Optical Engineering
ISSN: 0277786X
Appears in Collections:Staff Publications

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