Please use this identifier to cite or link to this item: https://doi.org/10.1109/JSTQE.2009.2016436
Title: Two-axis gimbal-less electrothermal micromirror for large-angle circumferential scanning
Authors: Xu, Y.
Singh, J.
Selvaratnam, T.
Chen, N. 
Keywords: Electrothermal effects
Microelectromechanical devices
Micromachining
Issue Date: Sep-2009
Source: Xu, Y., Singh, J., Selvaratnam, T., Chen, N. (2009-09). Two-axis gimbal-less electrothermal micromirror for large-angle circumferential scanning. IEEE Journal on Selected Topics in Quantum Electronics 15 (5) : 1432-1438. ScholarBank@NUS Repository. https://doi.org/10.1109/JSTQE.2009.2016436
Abstract: In this paper, we present the design, simulation, fabrication, and characterization of a two-axis gimbal-less micromirror optimized for large-angle circumferential scanning applications. The single-crystal silicon micromirror consists of novel folded bimorph electrothermal actuators, flexural springs, and a mirror plate coated with a high-reflective Cr/Au thin film. A modified silicon-on-insulator microelectromechanical system process has been applied on the micromirror fabrication. The single-wafer process is based on deep reactive ion etching in order to achieve high fill factor as well as small outline of the micromirror chip. A new mechanical design of bimorph actuators is developed to further increase the mechanical deflection. Both theoretical and experimental results demonstrate that the micromirror can provide a uniform mechanical deflection up to ∼9° with multichannel driving voltages of less than 2.3 V to any angle in full 360 ° circumference. © 2009 IEEE.
Source Title: IEEE Journal on Selected Topics in Quantum Electronics
URI: http://scholarbank.nus.edu.sg/handle/10635/74942
ISSN: 1077260X
DOI: 10.1109/JSTQE.2009.2016436
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