Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.compchemeng.2004.07.007
Title: An improved formulation for scheduling an automated wet-etch station
Authors: Karimi, I.A. 
Tan, Z.Y.L.
Bhushan, S.
Keywords: Flowshop
MILP
Scheduling
Shared resource
Wafer fabrication
Wet-etch station
Issue Date: 15-Dec-2004
Source: Karimi, I.A., Tan, Z.Y.L., Bhushan, S. (2004-12-15). An improved formulation for scheduling an automated wet-etch station. Computers and Chemical Engineering 29 (1) : 217-224. ScholarBank@NUS Repository. https://doi.org/10.1016/j.compchemeng.2004.07.007
Abstract: Wet-etching is a key step in wafer fabrication. An automated wet-etch process involves a complex interplay of zero wait and no-intermediate-storage policies, and a shared robot; and poses a challenging scheduling problem. In this paper, we reformulate a previously reported mixed integer linear programming (MILP) model for minimizing the makespan in an automated wet-etch station. Extensive numerical evaluation shows that the reformulations outperform their predecessors by a significant margin. Interestingly, this improvement in performance arises merely from a slightly redefined binary variable. We also present an effective empirical formula for ranking MILP models in a situation where assessing alternate models is difficult due to the absence of an outright winner, and problem- as well as machine-dependent relative performances of models. © 2004 Elsevier Ltd. All rights reserved.
Source Title: Computers and Chemical Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/74482
ISSN: 00981354
DOI: 10.1016/j.compchemeng.2004.07.007
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