Please use this identifier to cite or link to this item: https://doi.org/10.1117/12.582235
Title: Wafer level packaging of pressure sensor using SU8 photoresist
Authors: Iliescu, C.
Tay, F.E.H. 
Miao, J.
Avram, M.
Keywords: Pressure sensor
SU8
Wafer level packaging
Wafer-to-wafer bonding
Issue Date: 2005
Source: Iliescu, C., Tay, F.E.H., Miao, J., Avram, M. (2005). Wafer level packaging of pressure sensor using SU8 photoresist. Proceedings of SPIE - The International Society for Optical Engineering 5649 (PART 1) : 297-305. ScholarBank@NUS Repository. https://doi.org/10.1117/12.582235
Abstract: This paper presents a wafer level packaging solution for MEMS devices using wafer to wafer bonding with SU8-5 negative photoresist. A sensitive piezoelectric pressure sensor with the pressure range between 0 and 0.4 bar was chosen to test the quality of the solution. As stress induced by the packaging technique is the main challenge in MEMS encapsulation, the piezoresistive pressure sensors with its tensometric bridge offer a good opportunity for testing the packaging solution. The offset modification of the diffused piezoresistive Wheatstone bridge fabricated on a 15 μm thin diaphragm is directly influenced by the value of the stress induced by the packaging. In our paper the silicon wafer with pressure sensors is sandwiched between a bottom silicon wafer with etched holes for the applied pressure and a top glass wafer with via-holes and metallization leads. Silicon and Pyrex glass (Corning 7740) was used as materials for packaging mainly due to their thermal coefficient of expansion. The results, variation of tensometric bridge in the range between -5 mV to +5 mV at 10 VDC power supply shows that the packaging solution can be applied for MEMS packaging.
Source Title: Proceedings of SPIE - The International Society for Optical Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/74011
ISSN: 0277786X
DOI: 10.1117/12.582235
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