Please use this identifier to cite or link to this item: https://doi.org/10.1117/12.514242
Title: Vibration measurement of micro-components by fringe projection method
Authors: Wu, T.
Tay, C. 
Quan, C. 
Wang, S. 
Shang, H.
Keywords: Dynamic measurement
Fast Fourier transform (FFT)
Fringe projection
High-speed camera
MEMS
Nondestructive testing
Vibration measurement
White light source
Issue Date: 2003
Source: Wu, T., Tay, C., Quan, C., Wang, S., Shang, H. (2003). Vibration measurement of micro-components by fringe projection method. Proceedings of SPIE - The International Society for Optical Engineering 5116 II : 912-923. ScholarBank@NUS Repository. https://doi.org/10.1117/12.514242
Abstract: This paper presents an optical fringe projection method for measuring the dynamic micro-components. Using a programmable liquid crystal display (LCD) projector and a long working distance microscope (LDM), sinusoidal fringes are projected onto a micro-component. The image of the fringe pattern is captured by another LDM and a high-speed camera and subsequently processed by the Fast Fourier Transform (FFT) technique. A simple procedure is described which enables calibration of the optical setup for subsequent amplitude and frequency measurement of the vibrating components. To overcome the underexposure problem, a white light source (WLS) is incorporated and the dynamic range of the camera is increased by a factor of 6. Discrepancy in the measured vibration amplitude is less than 1%.
Source Title: Proceedings of SPIE - The International Society for Optical Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/74003
ISSN: 0277786X
DOI: 10.1117/12.514242
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