Please use this identifier to cite or link to this item: https://doi.org/10.1243/17547164C0012009007
Title: Tool-based compound micro/nano-machining
Authors: Rahman, M. 
Asad, A.B.M.A.
Masaki, T.
Saleh, T.
Nath, C.
Wong, Y.S. 
Kumar, A.S. 
Lim, H.S. 
Keywords: Compound micro-machining
Diamond turning
ELID grinding
Tool-based micro/nano-machining
Issue Date: 2009
Source: Rahman, M., Asad, A.B.M.A., Masaki, T., Saleh, T., Nath, C., Wong, Y.S., Kumar, A.S., Lim, H.S. (2009). Tool-based compound micro/nano-machining. International Conferences on Multi-Material Micro Manufacture, 4M/International Conferences on Micro Manufacturing, ICOMM : 59-72. ScholarBank@NUS Repository. https://doi.org/10.1243/17547164C0012009007
Abstract: In recent years, there has been marked increase in demand for product miniaturization in industry segments ranging from aerospace, automotive, medical devices and information technology. Furthermore, recent fervour in nanotechnology has also created urgent need to developed interfacing devices from the nano world to these miniaturized products. Compound micro-machining is the most promising technology for the production of miniaturized parts and this technology is becoming more and more important and popular because of growing demand for industrial products with not only increased number of functions but also of reduced dimensions, higher dimensional accuracy and better surface finish. In this paper, the development efforts in micro/nano-machining based on solid tools (tool-based micro/nano-machining) in NUS are introduced. Tool-based micro/nano machining is based on development of conventional precision engineering technology to achieve micron level features, submicron accuracy and nanometer level surface finish. In order to achieve meaningful implementation of micromachining techniques, this research seeks to address four important areas; namely (a) development of machine tool capable to do both conventional micro-machining including micro-turning, micro-milling, etc. and non-conventional micro-machining including electrical discharge machining (EDM), wire-cut EDM (WEDM), wire-electrical discharge grinding (WEDG) of hybrid micro-machining, (b) process control, (c) process development to achieve necessary accuracy and quality, and (d) on-machine measurement and inspection. An integrated effort in these areas has resulted in successful fabrication of micro-structures that is able to meet the miniaturization demands of the industry. This paper presents few tool-based approaches integrating micro-EDM, micro-EDG, micro-turning and micro-grinding to produce miniature components. In the area of nano-machining machine tool and process developments have also been carried out for electrolytic in-process dressing (ELID) grinding and ultra precision machining using single point and poly crystalline diamond tools to produce nano surface finish on hard and brittle materials. An ultra-precision diamond turning machine has been developed which incorporates a fast and fine tool servo system to produce nano-precision surfaces and features.
Source Title: International Conferences on Multi-Material Micro Manufacture, 4M/International Conferences on Micro Manufacturing, ICOMM
URI: http://scholarbank.nus.edu.sg/handle/10635/73965
DOI: 10.1243/17547164C0012009007
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