Please use this identifier to cite or link to this item: https://doi.org/10.1117/12.420880
Title: Study of snap-down phenomenon in an electrostatically-actuated torsional micromirror
Authors: Chau, F.S. 
Zhang, X.M.
Quan, C. 
Liu, A.Q.
Issue Date: 2001
Source: Chau, F.S., Zhang, X.M., Quan, C., Liu, A.Q. (2001). Study of snap-down phenomenon in an electrostatically-actuated torsional micromirror. Proceedings of SPIE - The International Society for Optical Engineering 4235 : 387-394. ScholarBank@NUS Repository. https://doi.org/10.1117/12.420880
Abstract: In this paper, the snap-down phenomenon in an electrostatically-actuated torsional micromirror is investigated. Based on the static actuation relation of torsional micromirrors, the relationship between snap-down angle and the structural parameters of the torsional micromirror is derived. It is shown that the snap-down angle is mainly determined by the size and position of the electrodes. Most importantly, it is found that the product of the normalized snap-down angle and the normalized size of the electrode is equal to a constant of 0.4404, which is universal for all torsional micromirrors of this kind of configuration, and is very useful for micromirror design. The relationship between the maximum driving voltage and the snap-down angle is also studied. Finally, a group of torsional micromirrors has been fabricated using multi-layer polysilicon processes, and then been tested to verify the analysis.
Source Title: Proceedings of SPIE - The International Society for Optical Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/73884
ISSN: 0277786X
DOI: 10.1117/12.420880
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

Page view(s)

36
checked on Dec 10, 2017

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.