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|Title:||Residual stress and profile evaluation on an optical MEMS device|
|Authors:||Tay, C.J. |
White light interferometry
|Citation:||Tay, C.J.,Quan, C.,Akkipeddi, R.,Gopal, M. (2009). Residual stress and profile evaluation on an optical MEMS device. Society for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009 2 : 786-791. ScholarBank@NUS Repository.|
|Abstract:||In this paper, we describe a method based on a vertical scanning interferometry (VSI) and a micro-Raman spectroscopy for the evaluation of residual profile and stresses of a InP based free-standing MEMS device. The membrane is designed to satisfy both mechanical and optical requirements for a wavelength division multiplexing (WDM) device. The device evaluated shows that the resulting surface profile deviation and residual stresses induced are within acceptably low levels. ©2009 Society for Experimental Mechanics Inc.|
|Source Title:||Society for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009|
|Appears in Collections:||Staff Publications|
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