Please use this identifier to cite or link to this item:
|Title:||Residual stress and profile evaluation on an optical MEMS device|
|Authors:||Tay, C.J. |
White light interferometry
|Source:||Tay, C.J.,Quan, C.,Akkipeddi, R.,Gopal, M. (2009). Residual stress and profile evaluation on an optical MEMS device. Society for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009 2 : 786-791. ScholarBank@NUS Repository.|
|Abstract:||In this paper, we describe a method based on a vertical scanning interferometry (VSI) and a micro-Raman spectroscopy for the evaluation of residual profile and stresses of a InP based free-standing MEMS device. The membrane is designed to satisfy both mechanical and optical requirements for a wavelength division multiplexing (WDM) device. The device evaluated shows that the resulting surface profile deviation and residual stresses induced are within acceptably low levels. ©2009 Society for Experimental Mechanics Inc.|
|Source Title:||Society for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Dec 9, 2017
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.