Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/73814
Title: Residual stress and profile evaluation on an optical MEMS device
Authors: Tay, C.J. 
Quan, C. 
Akkipeddi, R.
Gopal, M.
Keywords: Fabry-Perot filter
Raman spectroscopy
Residual stresses
White light interferometry
Issue Date: 2009
Source: Tay, C.J.,Quan, C.,Akkipeddi, R.,Gopal, M. (2009). Residual stress and profile evaluation on an optical MEMS device. Society for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009 2 : 786-791. ScholarBank@NUS Repository.
Abstract: In this paper, we describe a method based on a vertical scanning interferometry (VSI) and a micro-Raman spectroscopy for the evaluation of residual profile and stresses of a InP based free-standing MEMS device. The membrane is designed to satisfy both mechanical and optical requirements for a wavelength division multiplexing (WDM) device. The device evaluated shows that the resulting surface profile deviation and residual stresses induced are within acceptably low levels. ©2009 Society for Experimental Mechanics Inc.
Source Title: Society for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009
URI: http://scholarbank.nus.edu.sg/handle/10635/73814
ISBN: 9781615671892
Appears in Collections:Staff Publications

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