Please use this identifier to cite or link to this item: https://doi.org/10.1109/OMEMS.2010.5672205
Title: Optical scanning with MEMS in-plane vibratory gratings and its applications
Authors: Zhou, G. 
Du, Y. 
Cheo, K.K.L. 
Yu, H. 
Chau, F.S. 
Issue Date: 2010
Source: Zhou, G.,Du, Y.,Cheo, K.K.L.,Yu, H.,Chau, F.S. (2010). Optical scanning with MEMS in-plane vibratory gratings and its applications. 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 : 21-22. ScholarBank@NUS Repository. https://doi.org/10.1109/OMEMS.2010.5672205
Abstract: MEMS optical scanners are highly desired due to their low-power, high-speed scanning. The in-plane vibratory grating scanner is a development in this area which possesses several unique features. The in-plane scanning minimizes the dynamic deformation, allowing for higher-resolution displays. The dispersive element permits splitting the incoming beam into its constituents for analysis and imaging. Coupling a grating platform to an in-plane moving structure is useful for real-time motion measurement which would otherwise be difficult to analyze. These applications are described including a recent development in the structural design of a double-layer layout which further improves the performance of the grating scanner. ©2010 IEEE.
Source Title: 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
URI: http://scholarbank.nus.edu.sg/handle/10635/73719
ISBN: 9781424489251
DOI: 10.1109/OMEMS.2010.5672205
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