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https://doi.org/10.1023/B:ALOG.0000032595.72995.62
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dc.title | Neural network approach for linearization of the electrostatically actuated double-gimballed micromirror | |
dc.contributor.author | Zhou, G. | |
dc.contributor.author | Cheo, K.K.L. | |
dc.contributor.author | Tay, F.E.H. | |
dc.contributor.author | Chau, F.S. | |
dc.date.accessioned | 2014-06-19T05:38:01Z | |
dc.date.available | 2014-06-19T05:38:01Z | |
dc.date.issued | 2004-08 | |
dc.identifier.citation | Zhou, G., Cheo, K.K.L., Tay, F.E.H., Chau, F.S. (2004-08). Neural network approach for linearization of the electrostatically actuated double-gimballed micromirror. Analog Integrated Circuits and Signal Processing 40 (2) : 141-153. ScholarBank@NUS Repository. https://doi.org/10.1023/B:ALOG.0000032595.72995.62 | |
dc.identifier.issn | 09251030 | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/73677 | |
dc.description.abstract | In this paper, a hierarchical circuit based approach is used for the development of a reduced-order macro-model for a double-gimballed electrostatic torsional micromirror. The nonlinearity and cross-axis coupling of the micromirror subjected to the differential driving scheme are investigated using the proposed macro-model. The simulation results are used to train a feed-forward neural network which carries out a function approximation of the relation between the desired location and the required driving voltages. The trained neural network is then coded into MAST AHDL. System-level simulation of the micromirror together with the neural network is performed in the SABER™ simulator. It is found that using a feed-forward neural network, the linearity of the micromirror is greatly improved, the steady state of the cross-axis coupling is reduced to a negligible level and the transient response of the cross-axis coupling is also suppressed. This implies that introducing a feed-forward neural network would be useful to simplify the design of the feedback control system for the double-gimballed electrostatic torsional micromirror. | |
dc.description.uri | http://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1023/B:ALOG.0000032595.72995.62 | |
dc.source | Scopus | |
dc.subject | MEMS | |
dc.subject | Micromirror and macro modeling | |
dc.subject | Optical MEMS | |
dc.type | Conference Paper | |
dc.contributor.department | MECHANICAL ENGINEERING | |
dc.description.doi | 10.1023/B:ALOG.0000032595.72995.62 | |
dc.description.sourcetitle | Analog Integrated Circuits and Signal Processing | |
dc.description.volume | 40 | |
dc.description.issue | 2 | |
dc.description.page | 141-153 | |
dc.description.coden | AICPE | |
dc.identifier.isiut | 000222210800004 | |
Appears in Collections: | Staff Publications |
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