Please use this identifier to cite or link to this item: https://doi.org/10.1117/12.970532
Title: Micro-profile measurement of a transparent coating using windowed Fourier transform in white-light vertical scanning interferometry
Authors: Ma, S.
Quan, C. 
Zhu, R.
Chen, L.
Keywords: Micro-profile measurement
Transparent coating
White-light vertical scanning interferometry
Windowed Fourier Transform
Issue Date: 2012
Source: Ma, S., Quan, C., Zhu, R., Chen, L. (2012). Micro-profile measurement of a transparent coating using windowed Fourier transform in white-light vertical scanning interferometry. Proceedings of SPIE - The International Society for Optical Engineering 8417 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.970532
Abstract: Owing to free of the phase ambiguity problem, white-light vertical scanning interferometry (WLVSI) is commonly used to inspect surface profiles of objects, especially for the micro-profile measurement of microelectromechanical systems (MEMS) devices. Although numerous algorithms have been proposed for the white-light interference signal analysis, most of them focused only on test objects with a single reflective surface. In this paper, a technique to measure the micro-profile of a transparent coating using windowed Fourier transform in WLVSI is described. A windowed Fourier filtering (WFF) operation is first adopted to roughly estimate the local peak positions of a recorded interference signal. Subsequently a least-square estimation based on the retrieved phase values of a filtered signal is separately applied into previously extracted local peak positions to achieve more accurate micro-profile results. The thickness of the coating can be finally estimated by the retrieved reflective surfaces. Experimental works, conducted on a flat plate and a MEMS device with a transparent coating on its substrate, demonstrate the validity of the proposed method. © 2012 SPIE.
Source Title: Proceedings of SPIE - The International Society for Optical Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/73612
ISBN: 9780819490995
ISSN: 0277786X
DOI: 10.1117/12.970532
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