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|Title:||MEMS-driven diffraction gratings for rapid scanning of laser beams with very high optical resolution|
|Authors:||Zhou, G. |
|Citation:||Zhou, G., Du, Y., Cheo, K.K.L., Chau, F.S. (2011). MEMS-driven diffraction gratings for rapid scanning of laser beams with very high optical resolution. Proceedings of SPIE - The International Society for Optical Engineering 8191 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.901076|
|Abstract:||Miniaturized low-power, high-speed scanners are tremendously useful in a variety of applications. Besides MEMS micromirrors, the in-plane vibratory grating scanner is a development in this area which possesses several unique features. The in-plane scanning mechanism minimizes the dynamic non-rigid-body out-of-plane deformation of the mirror surface, allowing for higher-resolution displays. The dispersive element permits splitting the incoming beam into its constituents for analysis. Coupling a grating platform to an in-plane moving structure is also useful for real-time motion measurement which would otherwise be difficult to pick-up. The past developments till the current design are explored in this paper. Possible alternative applications besides image display, for example spectral imaging and realtime motion sensing are also described. © 2011 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE).|
|Source Title:||Proceedings of SPIE - The International Society for Optical Engineering|
|Appears in Collections:||Staff Publications|
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