Please use this identifier to cite or link to this item: https://doi.org/10.1117/12.901076
Title: MEMS-driven diffraction gratings for rapid scanning of laser beams with very high optical resolution
Authors: Zhou, G. 
Du, Y. 
Cheo, K.K.L. 
Chau, F.S. 
Keywords: Diffraction Gratings
MEMS
Micromirrors
Optical Scanners
Issue Date: 2011
Source: Zhou, G., Du, Y., Cheo, K.K.L., Chau, F.S. (2011). MEMS-driven diffraction gratings for rapid scanning of laser beams with very high optical resolution. Proceedings of SPIE - The International Society for Optical Engineering 8191 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.901076
Abstract: Miniaturized low-power, high-speed scanners are tremendously useful in a variety of applications. Besides MEMS micromirrors, the in-plane vibratory grating scanner is a development in this area which possesses several unique features. The in-plane scanning mechanism minimizes the dynamic non-rigid-body out-of-plane deformation of the mirror surface, allowing for higher-resolution displays. The dispersive element permits splitting the incoming beam into its constituents for analysis. Coupling a grating platform to an in-plane moving structure is also useful for real-time motion measurement which would otherwise be difficult to pick-up. The past developments till the current design are explored in this paper. Possible alternative applications besides image display, for example spectral imaging and realtime motion sensing are also described. © 2011 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE).
Source Title: Proceedings of SPIE - The International Society for Optical Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/73602
ISBN: 9780819488329
ISSN: 0277786X
DOI: 10.1117/12.901076
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