Please use this identifier to cite or link to this item: https://doi.org/10.1109/SENSOR.2009.5285828
Title: Hyperspectral imaging using a micromachined in-plane vibratory grating scanner
Authors: Zhou, G. 
Cheo, K.K.L. 
Du, Y. 
Chau, F.S. 
Keywords: Grating scanner
Hyperspectral imaging
MEMS
Issue Date: 2009
Source: Zhou, G.,Cheo, K.K.L.,Du, Y.,Chau, F.S. (2009). Hyperspectral imaging using a micromachined in-plane vibratory grating scanner. TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems : 1377-1380. ScholarBank@NUS Repository. https://doi.org/10.1109/SENSOR.2009.5285828
Abstract: A novel hyperspectral imaging application of the MEMS grating scanner is proposed in this paper. By utilizing the high-speed and optically dispersive characteristic of the grating scanner, a potentially low-cost, small footprint configuration is demonstrated. High-speed scanning without significant optical degradation due to dynamic deformation of the platform is possible using grating scanner. The single photodetector system relies on the grating scanner to perform spatial scanning and two slower galvano-mirror scanners to perform spectral scanning. A system proof-of-concept was successfully demonstrated in acquiring the spectral image and spatial dimensions of two reference laser diodes. ©2009 IEEE.
Source Title: TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
URI: http://scholarbank.nus.edu.sg/handle/10635/73518
ISBN: 9781424441938
DOI: 10.1109/SENSOR.2009.5285828
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