Please use this identifier to cite or link to this item: https://doi.org/10.1117/12.429583
Title: Evaluation of micro-beam deflection using interferometry
Authors: Wang, S.H. 
Tay, C.J. 
Quan, C. 
Shang, H.M. 
Keywords: Deflection measurement
FFT
Interferometry
MEMS
Micro-beam
Issue Date: 2001
Source: Wang, S.H., Tay, C.J., Quan, C., Shang, H.M. (2001). Evaluation of micro-beam deflection using interferometry. Proceedings of SPIE - The International Society for Optical Engineering 4317 : 262-267. ScholarBank@NUS Repository. https://doi.org/10.1117/12.429583
Abstract: Current trends in the miniaturization of microelectromechanical system (MEMS) require the use of increasingly smaller components. MEMS has already offered challenging opportunities for improving test techniques. In this paper we have developed a technique for testing deflections of a micro-beam in an accelerometer under point-force load. The technique is based on light interferometry. A collimated monochromatic light is directed into an air-wedge consists of an optical flat and a micro-beam. A long distance microscope with a CCD camera is utilized to capture the interference fringe pattern which results from recombination of two-beam reflected from the optical flat and the micro-beam. The resulting fringe patterns are analyzed by the use of Fast Fourier Transform (FFT) and deflections of the micro-beam are obtained. The experimental results show that the proposed technique is relatively simple and accurate, and is a potential method for conducting measurement on micro-components.
Source Title: Proceedings of SPIE - The International Society for Optical Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/73438
ISSN: 0277786X
DOI: 10.1117/12.429583
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