Please use this identifier to cite or link to this item: https://doi.org/10.1117/12.852070
Title: Dynamic characterization of a 2-DOF circular resonator-driven vibratory grating scanner with geometric nonlinearity
Authors: Du, Y. 
Zhou, G. 
Chau, F.S. 
Cheo, K.L. 
Zhang, Q.
Feng, H.
Keywords: Diffraction grating
Geometric nonlinearity
Micro resonators
Micro scanners
Issue Date: 2010
Source: Du, Y., Zhou, G., Chau, F.S., Cheo, K.L., Zhang, Q., Feng, H. (2010). Dynamic characterization of a 2-DOF circular resonator-driven vibratory grating scanner with geometric nonlinearity. Proceedings of SPIE - The International Society for Optical Engineering 7522 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.852070
Abstract: A micro-sized 2-DOF grating laser scanner which is made to vibrate in-plane by an electrical comb-driven circular resonator drive is fabricated and tested. The frequency response of the prototype scanner in atmosphere to different driving voltages and the variations of its natural frequency with scanning amplitude are measured. The results are compared with those from finite element simulations using a comprehensive dynamic model, including the effects of geometric nonlinearity of the flexural beams under large deformations. The comparison shows that the predictions made by the developed nonlinear model are generally valid. © 2010 SPIE.
Source Title: Proceedings of SPIE - The International Society for Optical Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/73380
ISBN: 9780819479129
ISSN: 0277786X
DOI: 10.1117/12.852070
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

Page view(s)

22
checked on Dec 10, 2017

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.