Please use this identifier to cite or link to this item:
|Title:||Dielectrophoretic chip with bulk Silicon electrodes|
|Keywords:||Bulk silicon electrodes|
|Citation:||Iliescu, C., Xu, G.L., Tay, F.E.H., Samper, V. (2005). Dielectrophoretic chip with bulk Silicon electrodes. Progress in Biomedical Optics and Imaging - Proceedings of SPIE 5651 : 254-264. ScholarBank@NUS Repository. https://doi.org/10.1117/12.581022|
|Abstract:||In this work we present the dielectrophoretic structure fabricated using two glass wafers and one 0.5 mm thick and highly conductive silicon wafer. In fabricated device the DEP force extends uniformly across the volume of the microfluidic device in the direction normal to the wafer plane. This is achieved by fabricating microfluidic channel walls from doped silicon so that they can also function as DEP electrodes. The advantages of the structure are: electrical leadouts that are free from the fluid leakage usually associated with the lead out recesses, a volume DEP force for deep chambers compared with the surface forces achieved by planar electrodes, no electrical dead volumes as encountered above the thin planar electrodes of alternative technologies, biocompatible silicon oxide passivated surfaces, and no electrochemical effects that arise from edge effects in multi-metal electrodes such as Ti/Au or Cr/Au.|
|Source Title:||Progress in Biomedical Optics and Imaging - Proceedings of SPIE|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Nov 13, 2018
WEB OF SCIENCETM
checked on Nov 5, 2018
checked on Oct 20, 2018
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.