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|Title:||Design and characterization of a fourier transform micro-spectrometer|
Optical path difference
Silicon micromachining technology
|Citation:||Wang, S.H., Yu, H.B., Chau, F.S., Tang, X.S. (2009). Design and characterization of a fourier transform micro-spectrometer. Advanced Materials Research 74 : 211-214. ScholarBank@NUS Repository. https://doi.org/10.4028/www.scientific.net/AMR.74.211|
|Abstract:||In this paper, we present a Fourier Transform micro-spectrometer which works based on a lamellar grating interferometer. The spectrometer model is electrostatically driven by parallel plate actuators which change the optical path difference (OPD) between movable grating facets and fixed ones. With a 200V input voltage, a maximum OPD of 48.7μm is achieved. The spectrum of a combined light source of a diode-pumped solid-state (DPSS) laser (λ=532.0nm) and a laser diode (λ=637.2nm) is experimentally acquired to demonstrate the performance of the model. The reconstructed spectrum displays two separate spectral peaks at 530.5nm and 635.2nm and the corresponding full-width at half-maximum (FWHM) resolutions are 9.8nm and 12.8nm respectively, indicating good wavelength accuracy and optical resolution. © (2009) Trans Tech Publications.|
|Source Title:||Advanced Materials Research|
|Appears in Collections:||Staff Publications|
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