Please use this identifier to cite or link to this item: https://doi.org/10.4028/www.scientific.net/AMR.74.211
Title: Design and characterization of a fourier transform micro-spectrometer
Authors: Wang, S.H.
Yu, H.B. 
Chau, F.S. 
Tang, X.S.
Keywords: Micro-spectrometer
Optical path difference
Silicon micromachining technology
Issue Date: 2009
Source: Wang, S.H., Yu, H.B., Chau, F.S., Tang, X.S. (2009). Design and characterization of a fourier transform micro-spectrometer. Advanced Materials Research 74 : 211-214. ScholarBank@NUS Repository. https://doi.org/10.4028/www.scientific.net/AMR.74.211
Abstract: In this paper, we present a Fourier Transform micro-spectrometer which works based on a lamellar grating interferometer. The spectrometer model is electrostatically driven by parallel plate actuators which change the optical path difference (OPD) between movable grating facets and fixed ones. With a 200V input voltage, a maximum OPD of 48.7μm is achieved. The spectrum of a combined light source of a diode-pumped solid-state (DPSS) laser (λ=532.0nm) and a laser diode (λ=637.2nm) is experimentally acquired to demonstrate the performance of the model. The reconstructed spectrum displays two separate spectral peaks at 530.5nm and 635.2nm and the corresponding full-width at half-maximum (FWHM) resolutions are 9.8nm and 12.8nm respectively, indicating good wavelength accuracy and optical resolution. © (2009) Trans Tech Publications.
Source Title: Advanced Materials Research
URI: http://scholarbank.nus.edu.sg/handle/10635/73314
ISBN: 0878493212
ISSN: 10226680
DOI: 10.4028/www.scientific.net/AMR.74.211
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