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Please use this identifier to cite or link to this item: https://doi.org/10.1063/1.2436350
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dc.titleDeep X-ray lithography in the fabrication process of a 3D diffractive optical element
dc.contributor.authorHeussler, S.P.
dc.contributor.authorMoser, H.O.
dc.contributor.authorQuan, C.G.
dc.contributor.authorTay, C.J.
dc.contributor.authorMoeller, K.D.
dc.contributor.authorBahou, M.
dc.contributor.authorJian, L.K.
dc.date.accessioned2014-06-19T05:33:34Z
dc.date.available2014-06-19T05:33:34Z
dc.date.issued2007
dc.identifier.citationHeussler, S.P.,Moser, H.O.,Quan, C.G.,Tay, C.J.,Moeller, K.D.,Bahou, M.,Jian, L.K. (2007). Deep X-ray lithography in the fabrication process of a 3D diffractive optical element. AIP Conference Proceedings 879 : 1503-1506. ScholarBank@NUS Repository. <a href="https://doi.org/10.1063/1.2436350" target="_blank">https://doi.org/10.1063/1.2436350</a>
dc.identifier.isbn0735403732
dc.identifier.issn0094243X
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/73306
dc.description.abstractWe present first results of the fabrication process of a diffractive optical element (DOE) using deep X-ray lithography. The DOE forms the core of our proposed fast parallel-processing infrared Fourier transform interferometer (FPP FTIR) that works without moving parts and may allow instantaneous spectral analysis only limited by detector bandwidth. Design and specifications of the DOE are discussed. A fabrication process including deep X-ray lithography (DXRL) on stepped substrates is introduced. © 2007 American Institute of Physics.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1063/1.2436350
dc.sourceScopus
dc.subjectDiffractive optical element
dc.subjectFourier transform spectroscopy
dc.subjectX-ray lithography
dc.typeConference Paper
dc.contributor.departmentSINGAPORE SYNCHROTRON LIGHT SOURCE
dc.contributor.departmentMECHANICAL ENGINEERING
dc.description.doi10.1063/1.2436350
dc.description.sourcetitleAIP Conference Proceedings
dc.description.volume879
dc.description.page1503-1506
dc.identifier.isiutNOT_IN_WOS
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