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|Title:||Built-in optical angular position sensing mechanism for high-resolution vibratory grating scanner|
|Authors:||Cheo, K.K.L. |
|Keywords:||angular position sensing|
|Citation:||Cheo, K.K.L.,Zhou, G.,Du, Y.,Chau, F.S. (2011). Built-in optical angular position sensing mechanism for high-resolution vibratory grating scanner. International Conference on Optical MEMS and Nanophotonics : 17-18. ScholarBank@NUS Repository. https://doi.org/10.1109/OMEMS.2011.6031055|
|Abstract:||A built-in angular sensing mechanism unique to the vibratory grating scanner is demonstrated through utilizing the zeroth-order beam, of which the intensity variation is affected by the angular position of the grating platform. With the first-order diffracted beam used for optical scanning, the stationary zeroth-order beam can be used for angular position sensing. © 2011 IEEE.|
|Source Title:||International Conference on Optical MEMS and Nanophotonics|
|Appears in Collections:||Staff Publications|
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