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https://doi.org/10.1109/OMEMS.2011.6031055
Title: | Built-in optical angular position sensing mechanism for high-resolution vibratory grating scanner | Authors: | Cheo, K.K.L. Zhou, G. Du, Y. Chau, F.S. |
Keywords: | angular position sensing grating scanners MEMS micromirrors |
Issue Date: | 2011 | Citation: | Cheo, K.K.L., Zhou, G., Du, Y., Chau, F.S. (2011). Built-in optical angular position sensing mechanism for high-resolution vibratory grating scanner. International Conference on Optical MEMS and Nanophotonics : 17-18. ScholarBank@NUS Repository. https://doi.org/10.1109/OMEMS.2011.6031055 | Abstract: | A built-in angular sensing mechanism unique to the vibratory grating scanner is demonstrated through utilizing the zeroth-order beam, of which the intensity variation is affected by the angular position of the grating platform. With the first-order diffracted beam used for optical scanning, the stationary zeroth-order beam can be used for angular position sensing. © 2011 IEEE. | Source Title: | International Conference on Optical MEMS and Nanophotonics | URI: | http://scholarbank.nus.edu.sg/handle/10635/73237 | ISBN: | 9781457703362 | ISSN: | 21605033 | DOI: | 10.1109/OMEMS.2011.6031055 |
Appears in Collections: | Staff Publications |
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