Please use this identifier to cite or link to this item: https://doi.org/10.1109/OMEMS.2011.6031055
Title: Built-in optical angular position sensing mechanism for high-resolution vibratory grating scanner
Authors: Cheo, K.K.L. 
Zhou, G. 
Du, Y. 
Chau, F.S. 
Keywords: angular position sensing
grating scanners
MEMS
micromirrors
Issue Date: 2011
Source: Cheo, K.K.L.,Zhou, G.,Du, Y.,Chau, F.S. (2011). Built-in optical angular position sensing mechanism for high-resolution vibratory grating scanner. International Conference on Optical MEMS and Nanophotonics : 17-18. ScholarBank@NUS Repository. https://doi.org/10.1109/OMEMS.2011.6031055
Abstract: A built-in angular sensing mechanism unique to the vibratory grating scanner is demonstrated through utilizing the zeroth-order beam, of which the intensity variation is affected by the angular position of the grating platform. With the first-order diffracted beam used for optical scanning, the stationary zeroth-order beam can be used for angular position sensing. © 2011 IEEE.
Source Title: International Conference on Optical MEMS and Nanophotonics
URI: http://scholarbank.nus.edu.sg/handle/10635/73237
ISBN: 9781457703362
ISSN: 21605033
DOI: 10.1109/OMEMS.2011.6031055
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