Please use this identifier to cite or link to this item: https://doi.org/10.1109/OMEMS.2012.6318854
Title: An electrostatically-driven MEMS tunable miniature iris diaphragm
Authors: Yu, H. 
Zhou, G. 
Chau, F.S. 
Keywords: blade
MEMS
octagonal aperture
T-shaped beam
Tunable iris diaphragm
Issue Date: 2012
Source: Yu, H.,Zhou, G.,Chau, F.S. (2012). An electrostatically-driven MEMS tunable miniature iris diaphragm. International Conference on Optical MEMS and Nanophotonics : 164-165. ScholarBank@NUS Repository. https://doi.org/10.1109/OMEMS.2012.6318854
Abstract: A miniature tunable multi-blade iris diaphragm driven by microelectromechanical systems (MEMS) is developed. The diameter of the iris diaphragm aperture is experimentally demonstrated to be able to adjust continuously from 0.45 mm to 1.56 mm. © 2012 IEEE.
Source Title: International Conference on Optical MEMS and Nanophotonics
URI: http://scholarbank.nus.edu.sg/handle/10635/73165
ISBN: 9781457715112
ISSN: 21605033
DOI: 10.1109/OMEMS.2012.6318854
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