Please use this identifier to cite or link to this item: https://doi.org/10.1109/OMEMS.2012.6318892
Title: An electrostatic in-plane rotational MEMS micro-scanner
Authors: Mu, X.
Zhou, G. 
Du, Y. 
Kumar, A.S. 
Chau, F.S. 
Yu, H.
Tsai, J.M.-L.
Keywords: MEMS
optical coherence tomography
pyramidal polygon reflector
Issue Date: 2012
Source: Mu, X.,Zhou, G.,Du, Y.,Kumar, A.S.,Chau, F.S.,Yu, H.,Tsai, J.M.-L. (2012). An electrostatic in-plane rotational MEMS micro-scanner. International Conference on Optical MEMS and Nanophotonics : 240-241. ScholarBank@NUS Repository. https://doi.org/10.1109/OMEMS.2012.6318892
Abstract: The paper presents an electrostatic in-plane rotational MEMS micro-scanner for circumferential scanned endoscopic optical coherence tomography probe. A diamond-turning-soft-lithography technology is introduced for six-slanted-facets pyramidal polygon micro-reflector fabrication. © 2012 IEEE.
Source Title: International Conference on Optical MEMS and Nanophotonics
URI: http://scholarbank.nus.edu.sg/handle/10635/73164
ISBN: 9781457715112
ISSN: 21605033
DOI: 10.1109/OMEMS.2012.6318892
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