Please use this identifier to cite or link to this item: https://doi.org/10.1117/12.2005606
Title: A tunable split-ladder photonic crystal cavity by nanoelectromechanical actuator
Authors: Tian, F. 
Zhou, G. 
Chau, F.S. 
Deng, J.
Akkipeddi, R.
Tang, X.
Teo, S.L.
Loke, Y.C.
Keywords: MEMS/NEMS
Optomechanical coupling
Photonic crystal cavity
Resonance tuning
Issue Date: 2013
Source: Tian, F., Zhou, G., Chau, F.S., Deng, J., Akkipeddi, R., Tang, X., Teo, S.L., Loke, Y.C. (2013). A tunable split-ladder photonic crystal cavity by nanoelectromechanical actuator. Proceedings of SPIE - The International Society for Optical Engineering 8616 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.2005606
Abstract: In this paper, we demonstrate a novel split-ladder photonic crystal cavity, which can be tuned across a very large wavelength range by an on-chip integrated nano-electromechanical actuator. The nano-electromechanical actuator is used to control the cavity's central gap. When the cavity gap is widened, the resonance wavelength is blue-shifted correspondingly. The dimensions of the proposed split-ladder cavity are designed by 3D Finite-difference time-domain (FDTD) calculations. We fabricated and tested the devices. Experimental results show that the optomechanical coupling coefficient of the second order resonance mode is about 80 GHz/nm. In addition, there is a relatively linear relationship between the resonance shift and the gap change. The maximum measured resonance wavelength shift is about 17 nm, corresponding to a cavity central gap increase of 26 nm. © 2013 SPIE.
Source Title: Proceedings of SPIE - The International Society for Optical Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/73114
ISBN: 9780819493859
ISSN: 0277786X
DOI: 10.1117/12.2005606
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