Please use this identifier to cite or link to this item: https://doi.org/10.1109/OMEMS.2008.4607847
Title: A micromachined vibratory sub-wavelength diffraction grating laser scanner
Authors: Du, Y. 
Zhou, G. 
Cheo, K.K.L. 
Zhang, Q.
Feng, H.
Chau, F.S. 
Keywords: Diffraction grating
Micro-opto-electromechanical systems (MOEMS)
Micro-scanners
Issue Date: 2008
Source: Du, Y., Zhou, G., Cheo, K.K.L., Zhang, Q., Feng, H., Chau, F.S. (2008). A micromachined vibratory sub-wavelength diffraction grating laser scanner. 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS : 98-99. ScholarBank@NUS Repository. https://doi.org/10.1109/OMEMS.2008.4607847
Abstract: A novel MEMS based in-plane vibratory sub-wavelength diffraction grating scanner is reported. Diffraction efficiency of more than 75%, optical scan angle of 13.7° and scanning frequency of 20.35 kHz are experimentally achieved © 2008 IEEE.
Source Title: 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS
URI: http://scholarbank.nus.edu.sg/handle/10635/73043
ISBN: 9781424419180
DOI: 10.1109/OMEMS.2008.4607847
Appears in Collections:Staff Publications

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