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|Title:||A micromachined vibratory sub-wavelength diffraction grating laser scanner|
|Authors:||Du, Y. |
Micro-opto-electromechanical systems (MOEMS)
|Citation:||Du, Y., Zhou, G., Cheo, K.K.L., Zhang, Q., Feng, H., Chau, F.S. (2008). A micromachined vibratory sub-wavelength diffraction grating laser scanner. 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS : 98-99. ScholarBank@NUS Repository. https://doi.org/10.1109/OMEMS.2008.4607847|
|Abstract:||A novel MEMS based in-plane vibratory sub-wavelength diffraction grating scanner is reported. Diffraction efficiency of more than 75%, optical scan angle of 13.7° and scanning frequency of 20.35 kHz are experimentally achieved © 2008 IEEE.|
|Source Title:||2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS|
|Appears in Collections:||Staff Publications|
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