Please use this identifier to cite or link to this item: https://doi.org/10.1109/PGC.2010.5705982
Title: A MEMS platform for 2-D fine-positioning and locking of optical ball-lens in silicon photonics packaging
Authors: Zhang, Q.X.
Du, Y. 
Tan, C.W.
Zhang, J.
Yu, M.B.
Lo, G.Q.
Kwong, D.L.
Issue Date: 2010
Source: Zhang, Q.X.,Du, Y.,Tan, C.W.,Zhang, J.,Yu, M.B.,Lo, G.Q.,Kwong, D.L. (2010). A MEMS platform for 2-D fine-positioning and locking of optical ball-lens in silicon photonics packaging. 2010 Photonics Global Conference, PGC 2010 : -. ScholarBank@NUS Repository. https://doi.org/10.1109/PGC.2010.5705982
Abstract: This paper reports a novel silicon platform with integrated MEMS actuators, which is used for fine-positioning and locking of a ball-lens, to address the optical coupling issues in silicon photonics packaging. The fine-positioning and locking function of the ball-lens have been successfully demonstrated by the developed prototype silicon platform. The main adjusting actuator delivered a large force making the suspension arm moved for 50μm in-plane under the driving voltage of 30V. The displacement resolution is less than 0.1μm within working range of 25+/-5μm. Besides, mechanical locking of the suspension arm by micro-lockers has been achieved and the shift between the locked structures is less than 0.1μm after a vibration test at 2 kHz, 10g. Finally, active alignment of a ball lens in a LD/Si-waveguide optical coupling system is experimentally demonstrated by using the prototype silicon platform.
Source Title: 2010 Photonics Global Conference, PGC 2010
URI: http://scholarbank.nus.edu.sg/handle/10635/73037
ISBN: 9781424498826
DOI: 10.1109/PGC.2010.5705982
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