Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/72963
Title: Temperature Measurement on Micromachined IR Bolometers Using an Infrared Microscope
Authors: Trigg, A.D.
Sridhar, U.
Lee, H.S.
Karunasiri, G. 
Issue Date: 1999
Source: Trigg, A.D.,Sridhar, U.,Lee, H.S.,Karunasiri, G. (1999). Temperature Measurement on Micromachined IR Bolometers Using an Infrared Microscope. Conference Proceedings from the International Symposium for Testing and Failure Analysis : 189-193. ScholarBank@NUS Repository.
Abstract: Thermal properties are critical to the performance of micromachined silicon bolometers. In order to verify thermal models of the device, a means of measuring the local temperature distribution over the element is required, as it is heated by passing current through a thin film titanium meander. Because of the very low thermal mass of the membrane a non-contact method of temperature measurement is needed. Most conventional thermal imaging systems operate in the wavelength range 5-15 μm and offer poor spatial resolution but in this work an infrared microscope, operating at shorter wavelengths, was used. The microscope comprises an objective lens which focuses radiation onto a cooled (77K) cadmium mercury telluride focal plane array sensitive over the range 800 nm to 2500nm. For this application a bandpass filter centered at 2150 nm was used. Good agreement was obtained between finite element modeling of the temperature distribution, using ANSYS, and the measured data.
Source Title: Conference Proceedings from the International Symposium for Testing and Failure Analysis
URI: http://scholarbank.nus.edu.sg/handle/10635/72963
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